Abstract The paper provides an overview of analytical processes which were used in examination of properties of extremely thin layers of stannum dioxide and results that lead to the conclusions regarding the internal subatomic arrangement. The results are unique and legal protection of the essence of the technology has been initiated. The procedure of large-scale application was further successfully researched within a project funded by a grant from the Ministry of Education of Slovak Republic. Large-scale samples were delivered for measurement to Plataforma Solar de Almeria, the European Test Centre for Solar Energy Applications. Refractograms of both thin and thicker layers were used during examination. The results are compared with the measurement of square resistance. Structure of the layers can be related to the measured data only based on measurement of the development of properties over time, the so-called "history of square resistance", which was monitored throughout approximately 190 days under various conditions. Further deliberations are supported by measurements of light activity of layers using laser excitation, which is a universal indicator of the subatomic features of the dioxide layer. Conclusions of the measurements suffice as an argument for usage of direct methods of examination of structures as structures of superthin and subatomic nature. EDX microanalysis confirmed that the layers are extremely thin with parameters out of determinable range for the method. RTG diffraction analyses with two extremes at 0.141 nm and 0.28 nm correspond to the samples for which the calculation of width from the value of square resistance and unit resistance for SnO2 gives the second diffraction constant, given a linear dependency expectation. A single-peak diffraction record at 0.141 nm was not observed, even though the presence of the layer confirmed through R [?/] is undoubted. Change of square resistance over time and its stability is classifiable based on the values that were obtained when the samples had been originally created. The stable area is characteristic for samples with R that corresponds to the calculated 0.141 nm width. Half-stable behavior, or occasionally faster expiration, can be seen at values of R above the mentioned critical level. When above this value, the samples exhibit excitability by laser with unit output in the range of 1 - 2 kW/m2. This proves the presence of a less dense subatomic structure (subnanostructure), with parts excitable using a coherent light (? = 650 nm) with the mentioned unit output. It is apparently possible this way to indicate the presence of subatomic oxides even with non-conductive properties, which can also be prepared using the developed large-scale non-vacuum technology. For perfectly transparent, subatomically arranged SnO2, both converent and divergent excitations for reflexion as well as refraction through a glass pad were noticed. As an output of the research, apart from non-linear optical observations, an analysis of spatial arrangement of the layers is expected, as well as a comparison with a model for these subatomic structures. These results will be published further on then.