Abstract The objective of submitted work is to analyze the influence of the load on the micro-hardness of Cu, Al, Co, Ni, Fe, Zn and glass. The results were validated by Measurement Systems Analysis (MSA), Analysis of Variance (ANOVA) and Z-score. The relationship between the load and micro-hardness for measured materials can not be explained by Kick’s Law (the value of Meyer’s index “n” is different from 2). The micro-hardness increases with increasing load up to 0.2942 N; the reverse ISE behavior with n >2 is typical for this load interval. The influence of the load on the micro-hardness is statistically significant. The uncertainty decreases with increasing load and micro-hardness and of material. The capability of measurement process increases with increasing micro-hardness or Meyer’s index “n”. All results of Z-score are satisfactory.